High aspect ratio non-planar capacitors formed via cavity fill

ABSTRACT

A method for forming non-planar capacitors of desired dimensions is disclosed. The method is based on providing a three-dimensional structure of a first material over a substrate, enclosing the structure with a second material that is sufficiently etch-selective with respect to the first material, and then performing a wet etch to remove most of the first material but not the second material, thus forming a cavity within the second material. Shape and dimensions of the cavity are comparable to those desired for the final non-planar capacitor. At least one electrode of a capacitor may then be formed within the cavity. Using the etch selectivity of the first and second materials advantageously allows applying wet etch techniques for forming high aspect ratio openings in fabricating non-planar capacitors, which is easier and more reliable than relying on dry etch techniques.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a national stage application under 35 U.S.C. § 371of PCT International Application Serial No. PCT/US2017/053347, filed onSep. 26, 2017 and entitled “HIGH ASPECT RATIO NON-PLANAR CAPACITORSFORMED VIA CAVITY FILL,” which is hereby incorporated by referenceherein in its entirety.

TECHNICAL FIELD

This disclosure relates generally to the field of semiconductor devices,and more specifically, to non-planar capacitors for electronic devicecomponents, as well as methods for forming such capacitors.

BACKGROUND

High-breakdown capacitors are of great importance in various moderntechnologies, such as e.g. memories and radio frequency (RF) poweramplifiers. The name “high-breakdown” arises from the fact that suchcapacitors have an enhanced breakdown voltage, i.e. voltage at whichelectrical current starts flowing through capacitor's insulator layerthat separates the two capacitor's electrodes, an undesirable phenomenonthat can cause failure of electronic devices which include suchcapacitors.

Capacitors implementing non-planar architectures, e.g. cylindricalcapacitors, and high aspect ratio (AR) openings (i.e. ratios of a heightof an opening to a width of an opening) are particularly suitable forrealizing the high-breakdown requirement. However, fabricating suchcapacitors remains a challenge because conventional fabricationapproaches rely on dry etch to form large capacitors with high ARopenings, which is not easy to do. Hence, improvements in this respectwould be desirable.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments will be readily understood by the following detaileddescription in conjunction with the accompanying drawings. To facilitatethis description, like reference numerals designate like structuralelements. Embodiments are illustrated by way of example, and not by wayof limitation, in the figures of the accompanying drawings.

FIG. 1 is a flow diagram of an exemplary method for manufacturing anon-planar capacitor device assembly using cavity fill, in accordancewith various embodiments of the present disclosure.

FIGS. 2A-2H illustrate various stages in the manufacture of non-planarcapacitor device assemblies using the method shown in FIG. 2 inaccordance with two exemplary embodiments of the present disclosure.

FIGS. 3A and 3B are top views of a wafer and dies that include one ormore non-planar capacitors formed using the cavity fill method inaccordance with any of the embodiments disclosed herein.

FIG. 4 is a cross-sectional side view of an integrated circuit (IC)device that may include one or more non-planar capacitors formed usingthe cavity fill method in accordance with any of the embodimentsdisclosed herein.

FIG. 5 is a cross-sectional side view of an IC device assembly that mayinclude one or more non-planar capacitors formed using the cavity fillmethod in accordance with any of the embodiments disclosed herein.

FIG. 6 is a block diagram of an example computing device that mayinclude one or more non-planar capacitors formed using the cavity fillmethod in accordance with any of the embodiments disclosed herein.

DETAILED DESCRIPTION

Disclosed herein is a cavity fill method for forming non-planarcapacitors of desired dimensions, as well as some exemplary deviceassemblies which include such capacitors. The method is based onproviding a three-dimensional (3D) structure of a first material over asubstrate, enclosing the structure with a second material that issufficiently etch-selective with respect to the first material, and thenperforming wet etch to remove most of the first material butsubstantially none of the second material, thus forming a cavity withinthe second material. Shape and dimensions of the cavity are comparableto those desired for the final non-planar capacitor. At least oneelectrode of a capacitor may then be formed within the cavity, whichgives rise to the term “cavity fill” used herein to refer to such amethod of forming capacitors. Using the etch selectivity of the firstand second materials advantageously allows applying wet etch techniquesfor forming high AR openings in fabricating capacitors, which is easierand more reliable than utilizing dry etch techniques.

As known in the art, two materials are said to have “sufficient etchselectivity” when etchants used to etch one material do notsubstantially etch the other, enabling selective etching of one materialbut not the other.

Since most of the first material is removed, the first material isreferred to herein as a “sacrificial material.” Since the secondmaterial serves as a shell, i.e. a solid outer case inside which acavity can be formed, the second material is referred to herein as a“shell material.”

Another aspect of the present disclosure provides an exemplary deviceassembly that includes a substrate and a non-planar capacitor formedover the substrate using the cavity fill method described herein. Thecapacitor includes a first electrode and a second electrode, shaped ascylinders or prisms, the latter possibly with rounded corners, extendingaway from the substrate and being substantially perpendicular to thesubstrate, and a capacitor insulator provided between the first andsecond electrodes. The first capacitor electrode is encompassed (i.e.surrounded) by a dielectric stack comprising a layer of a firstdielectric material and a layer of a second dielectric material,different from the first dielectric material, the second dielectricmaterial including, or being a compound of, aluminum and nitrogen, e.g.the second dielectric material including or being aluminum nitride(AlN). Such a second dielectric material of the dielectric stackencompassing the first electrode of the capacitor is the shell materialemployed in the cavity fill method, while the first dielectric materialis a version of the sacrificial material employed in the cavity fillmethod modified (namely, hardened, as described in greater detail below)due to the deposition of the shell material onto it.

Non-planar capacitors formed via cavity fill as described herein may beimplemented in one or more components associated with an IC or/andbetween various such components. In various embodiments, componentsassociated with an IC include, for example, transistors, diodes, powersources, resistors, capacitors, inductors, sensors, transceivers,receivers, antennas, etc. Components associated with an IC may includethose that are mounted on an IC, provided as an integral part of an IC,or those connected to an IC. The IC may be either analog or digital andmay be used in a number of applications, such as memories, amplifiers,microprocessors, optoelectronics, logic blocks, etc., depending on thecomponents associated with the IC. The IC may be employed as part of achipset for executing one or more related functions in a computer.

For purposes of explanation, specific numbers, materials andconfigurations are set forth in order to provide a thoroughunderstanding of the illustrative implementations. However, it will beapparent to one skilled in the art that the present disclosure may bepracticed without the specific details or/and that the presentdisclosure may be practiced with only some of the described aspects. Inother instances, well known features are omitted or simplified in ordernot to obscure the illustrative implementations.

In the following detailed description, reference is made to theaccompanying drawings that form a part hereof, and in which are shown,by way of illustration, embodiments that may be practiced. Theaccompanying drawings are not necessarily drawn to scale. For example,to clarify various layers, structures, and regions, the thickness ofsome layers may be enlarged. Furthermore, while drawings illustratingvarious structures/assemblies of exemplary devices may be drawn withprecise right angles and straight lines, real world process limitationsmay prevent implementations of devices exactly as shown. Therefore, itis understood that such drawings revised to reflect example real worldprocess limitations, in that the features may not have precise rightangles and straight lines, are within the scope of the presentdisclosure. Drawings revised in this manner may be more representativeof real world structure/assemblies as may be seen on images usingvarious characterization tools, such as e.g. scanning electronmicroscopy (SEM) or transmission electron microscopy (TEM). In addition,the various structures/assemblies of the present drawings may furtherinclude possible processing defects, such as e.g. the rounding ofcorners, the drooping of the layers/lines, unintentional gaps and/ordiscontinuities, unintentionally uneven surfaces and volumes, etc.,although these possible processing defects may not be specifically shownin the drawings. It is to be understood that other embodiments may beutilized and structural or logical changes to the drawings anddescriptions may be made without departing from the scope of the presentdisclosure. Therefore, the following detailed description is not to betaken in a limiting sense.

Various operations may be described as multiple discrete actions oroperations in turn, in a manner that is most helpful in understandingthe claimed subject matter. However, the order of description should notbe construed as to imply that these operations are necessarily orderdependent. In particular, these operations may not be performed in theorder of presentation. Operations described may be performed in adifferent order from the described embodiment. Various additionaloperations may be performed, and/or described operations may be omittedin additional embodiments.

For the purposes of the present disclosure, the phrase “A and/or B”means (A), (B), or (A and B). For the purposes of the presentdisclosure, the phrase “A, B, and/or C” means (A), (B), (C), (A and B),(A and C), (B and C), or (A, B, and C). The term “between,” when usedwith reference to measurement ranges, is inclusive of the ends of themeasurement ranges. The meaning of “a,” “an,” and “the” include pluralreferences. The meaning of “in” includes “in” and “on.”

The description uses the phrases “in an embodiment” or “in embodiments,”which may each refer to one or more of the same or differentembodiments. Furthermore, the terms “comprising,” “including,” “having,”and the like, as used with respect to embodiments of the presentdisclosure, are synonymous. The disclosure may use perspective-baseddescriptions such as “above,” “below,” “top,” “bottom,” and “side”; suchdescriptions are used to facilitate the discussion and are not intendedto restrict the application of disclosed embodiments. Furthermore,stating in the present disclosure that any part (e.g. a layer, film,area, or plate) is in any way positioned on or over (e.g. positionedon/over, provided on/over, located on/over, disposed on/over, formedon/over, etc.) another part means that the referenced part is either incontact with the other part, or that the referenced part is above theother part with one or more intermediate part(s) located therebetween.On the other hand, stating that any part is in contact with another partmeans that there is no intermediate part between the two parts.

The terms “substantially,” “close,” “approximately,” “near,” and“about,” generally refer to being within +/−20% of a target value.Unless otherwise specified, the use of the ordinal adjectives “first,”“second,” and “third,” etc., to describe a common object, merelyindicate that different instances of like objects are being referred to,and are not intended to imply that the objects so described must be in agiven sequence, either temporally, spatially, in ranking or in any othermanner.

In the following detailed description, various aspects of theillustrative implementations will be described using terms commonlyemployed by those skilled in the art to convey the substance of theirwork to others skilled in the art. In some examples, as used herein, a“high-k dielectric” refers to a material having a higher dielectricconstant than silicon oxide, while the terms “oxide,” “carbide,”“nitride,” etc. refer to compounds containing, respectively, oxygen,carbon, nitrogen, etc. In another example, the term “connected” means adirect electrical or magnetic connection between the things that areconnected, without any intermediary devices, while the term “coupled”means either a direct electrical or magnetic connection between thethings that are connected or an indirect connection through one or morepassive or active intermediary devices. The term “circuit” means one ormore passive and/or active components that are arranged to cooperatewith one another to provide a desired function.

FIG. 1 is a flow diagram of an example method 100 for manufacturing anon-planar capacitor device assembly using cavity fill, in accordancewith various embodiments of the present disclosure. Device assemblies invarious example stages during the manufacture using the method 100 areillustrated in FIGS. 2A-2H, in accordance with some embodiments of thepresent disclosure. In particular, each of FIGS. 2A-2H illustrates twoalternative embodiments for an exemplary device assembly after arespective process of the method 100 shown in FIG. 1 has been performed.Namely, the two left-most illustrations of each of FIGS. 2A-2H are,respectively, a cross-sectional and a top view of the assembly accordingto a first embodiment of the present disclosure, while the tworight-most illustrations of each of FIGS. 2A-2H are, respectively, across-sectional and a top view of the assembly according to a secondembodiment of the present disclosure. With reference to the x-y-zcoordinate system shown at the bottom of FIGS. 2A-2H, the top view foreach of the two embodiments is the view in the z-y plane, while thebottom view for each of the two embodiments is the view in the x-yplane. In other words, in each of FIGS. 2A-2H, the bottom view is across-section along the plane A-A of the top view, while the top view isa cross-section of the respective assembly along the plane B-B of thebottom view, where dashed lines A-A and B-B are applicable to each ofFIGS. 2A-2H but are only shown for FIG. 2A (in order to not clutterother drawings) and are intended to illustrate planes which includethose lines and are perpendicular to the plane of the drawings.

A number of elements referred to in the description of FIGS. 2A-2H withreference numerals are indicated in these FIGS. with different patternsin order to not clutter the drawings, with a legend at the bottom ofFIGS. 2A-2H showing the correspondence between the reference numeralsand the patterns.

Various operations of the method 100 may be illustrated in FIGS. 2A-2Hwith some exemplary assemblies and explained with reference to someexemplary embodiments discussed below, but the method 100 may be used tomanufacture any suitable device assemblies with non-planar capacitorsaccording to any embodiments of the present disclosure. In addition,although the operations of the method 100 are illustrated in FIG. 1 onceeach and in a particular order, the operations may be performed in anysuitable order and repeated as desired. For example, one or moreoperations may be performed in parallel to manufacture multiple deviceassemblies with non-planar capacitors as described herein substantiallysimultaneously. In another example, the operations may be performed in adifferent order to reflect the architecture of a particular devicecomponent in which one or more non-planar capacitors as described hereinare to be included.

In addition, the manufacturing method 100 may include other operations,not specifically shown in FIG. 1, such as e.g. various cleaningoperations as known in the art. For example, in some embodiments, thedevice assembly may be cleaned prior to or/and after any of theprocesses of the method 100 described herein, e.g. to removesurface-bound organic and metallic contaminants, as well as subsurfacecontamination. In some embodiments, cleaning may be carried out usinge.g. a chemical solutions (such as peroxide), and/or with ultraviolet(UV) radiation combined with ozone, and/or oxidizing the surface (e.g.,using thermal oxidation) then removing the oxide (e.g. usinghydrofluoric acid (HF)).

As shown in FIG. 1, the method 100 may begin with a process 102 thatincludes providing over a portion of a substrate a three-dimensionalstructure of a sacrificial material. An exemplary result of the process102 is illustrated with a device assembly 202-1 and a device assembly202-2 shown in FIG. 2A for the first and second embodiments,respectively, where a substrate 222 is shown to have a structure 224 ofa sacrificial material 226 formed therein.

The substrate 222 may be any substrate on which devices as describedherein may be implemented. In some embodiments, the substrate 222 mayinclude a semiconductor, such as silicon. In other implementations, thesemiconductor substrate may be formed using alternate materials, whichmay or may not be combined with silicon, that include but are notlimited to germanium, silicon germanium, indium antimonide, leadtelluride, indium arsenide, indium phosphide, gallium arsenide, aluminumgallium arsenide, aluminum arsenide, indium aluminum arsenide, aluminumindium antimonide, indium gallium arsenide, gallium nitride, indiumgallium nitride, aluminum indium nitride or gallium antimonide, or othercombinations of group III-N or group IV materials. Although a fewexamples of materials from which the substrate may be formed aredescribed here, any material that may serve as a foundation upon which asemiconductor device may be built falls within the spirit and scope ofthe present disclosure. In some embodiments, the substrate 222 may be acrystalline substrate. In other embodiments, the substrate 222 may benon-crystalline.

The structure 224 formed in the process 102 is shown in the shape of acylinder for both embodiments shown in FIG. 2A and, consequently, forboth embodiments shown in FIGS. 2B-2H. However, in otherimplementations, the structure 224 for FIGS. 2A-2H may be in the shapeof a prism instead.

The shape and dimensions of the structure formed in the process 102should be selected appropriately keeping in mind that the shape anddimensions of this structure will later define the shape and dimensionsof at least a first electrode of the final non-planar capacitor,described in greater detail below. For example, in differentimplementations of the device assembly 202-1 of the first embodimentshown in FIGS. 2A-2H, the height of the structure 224 (i.e. a dimensionmeasured along the z-axis of the coordinate system shown in FIGS. 2A-2H)provided in the process 102 may be between about 100 and 5000 nanometers(nm), including all values and ranges therein, e.g. between about 200and 3000 nm, or between about 500 and 2000 nm, while the width of thestructure 224 (i.e. a dimension measured along the y-axis of thecoordinate system shown in FIGS. 2A-2H) may be between about 5 and 50nm, including all values and ranges therein, e.g. between about 10 and40 nm, or between about 20 and 30 nm. In different implementations ofthe device assembly 202-2 of the second embodiment shown in FIGS. 2A-2H,the height of the structure 224 provided in the process 102 may bebetween about 100 and 5000 nm, including all values and ranges therein,e.g. between about 200 and 3000 nm, or between about 500 and 2000 nm,while the width of the structure 224 may be between about 30 and 150 nm,including all values and ranges therein, e.g. between about 40 and 100nm, or between about 50 and 80 nm.

The sacrificial material 226 may include any material that hassufficient etch selectivity with respect to the shell material depositedaround the structure of the sacrificial material 226 in a later process(process 104, described below) and with respect to the substrate 222 (inorder to not avoid substrate undercutting when the sacrificial material226 is etched at a later process 108, described below). Besidesappropriate etching characteristics, some other considerations inselecting a suitable material for forming the structure 224 may includee.g. possibilities of smooth film formation, low shrinkage andoutgassing, and good dielectric properties (such as e.g. low electricalleakage, suitable value of a dielectric constant, and thermalstability).

In some embodiments, the sacrificial material 226 may be a sacrificialdielectric material, such as e.g. any of the low-k or high-k dielectricmaterials as commonly used in semiconductor processing, including butnot limited to elements such as hafnium, silicon, oxygen, nitrogen,titanium, tantalum, lanthanum, aluminum, zirconium, barium, strontium,yttrium, lead, scandium, niobium, and zinc. Further examples ofdielectric materials that may be used as the sacrificial material 226may include, but are not limited to silicon nitride, silicon oxide,silicon dioxide, silicon carbide, silicon nitride doped with carbon,silicon oxynitride, hafnium oxide, hafnium silicon oxide, lanthanumoxide, lanthanum aluminum oxide, zirconium oxide, zirconium siliconoxide, tantalum oxide, titanium oxide, barium strontium titanium oxide,barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminumoxide, tantalum oxide, tantalum silicon oxide, lead scandium tantalumoxide, and lead zinc niobate. Examples of low-k materials that may beused as the sacrificial material 226 may include, but are not limitedto, fluorine-doped silicon dioxide, carbon-doped silicon dioxide,spin-on organic polymeric dielectrics such as e.g. polyimide,polynorbornenes, benzocyclobutene, and polytetrafluoroethylene (PTFE),or spin-on silicon-based polymeric dielectric such as e.g. hydrogensilsesquioxane (HSQ) and methylsilsesquioxane (MSQ)).

Any suitable deposition techniques may be used to provide the structure224, possibly in combination with patterning as known in the art. Forexample, techniques such as e.g. spin-coating, dip-coating, chemicalvapor deposition (CVD), ALD, PECVD, or thermal oxidation may be used toprovide the sacrificial material 226, while patterning techniques suchas e.g. photolithographic or electron-beam patterning may be used todefine the shape of the structure 224.

Next, the method 100 may proceed with a process 104 of enclosing thethree-dimensional structure of the sacrificial material provided in theprocess 102 with a shell material. An exemplary result of the process104 is shown in FIG. 2B with a device assembly 204-1 for the firstembodiment and a device assembly 204-2 for the second embodiment, ineach of which the structure 224 is shown to be enclosed completely witha shell material 228. In general, the shell material 228 may be anymaterial within which a cavity can be formed in a later process byremoving at least some of the sacrificial dielectric material 226 by wetetch (i.e. any material satisfying the etch selectivity considerationswith respect to the sacrificial dielectric material 226, providedabove). However, inventors of the present disclosure realized that amaterial that includes aluminum and nitrogen, e.g. aluminum nitride(AlN), may be particularly advantageous for use as the shell material228, reasons for which are explained below.

It was realized that high temperature (i.e. temperatures of about 1000degrees Celsius) deposition of AlN provides additional hardening to thesacrificial dielectric material 226 near the deposition of AlN, thuscreating a liner of a hardened dielectric material which isetch-selective with respect to the original sacrificial dielectricprovided as the structure 224 in the process 102. Each of the deviceassemblies 204-1 and 204-2 of FIG. 2B illustrates such a hardeneddielectric liner 230 formed where the original sacrificial dielectricmaterial 226 was and where the original sacrificial dielectric material226 interfaced (i.e. was at a close proximity, preferably in contactwith) the shell material 228. Each of the bottom views for bothembodiments of FIG. 2B illustrates with a dotted line an outline of thestructure 224 covered with the shell material 228 extending away fromthe substrate 222, illustrates with a dashed line an outline of thestructure 224 underneath the shell material, and illustrates with adashed-dotted line an outline of the original sacrificial dielectricmaterial 226 that was not converted to the hardened dielectric liner230.

In some embodiments, such a high temperature deposition of AlN may beperformed by for metal organic chemical vapor deposition (MOCVD) orsputtered approaches. Similar to CVD or ALD, MOCVD is a chemical processin which one or more reactive precursor gases are introduced into areaction chamber and directed towards a substrate in order to inducecontrolled chemical reactions that result in growth of a desiredmaterial on the substrate. In the chamber, a layer of solid thin-filmmaterial is deposited on the surface of the substrate due to reaction ofthe gas/gases. What is unique to MOCVD is that one or more precursorsused are metal organic (MO) precursors, such as trimethyl-aluminum. Thenitrogen may be provided using either NH3 or N2 gas. The reaction togrow AlN occurs at very high temperatures (greater than 1000 degreesCelsius) which is what results in changing of the originally depositedsacrificial dielectric 226 to the hardened dielectric 230. Sputteringapproach to depositing AlN may involve performing physical vapordeposition (PVD) from an aluminum target in nitrogen gas ambient.Similar to MOCVD, such sputtering may be performed at temperaturesgreater than 1000 degrees Celsius, resulting in formation of thehardened dielectric 230 at the interfaces where AlN is deposited on theoriginally deposited sacrificial dielectric 226.

While FIG. 2B and subsequent FIGS. illustrate an embodiment where thehardened dielectric 230 is formed, in other embodiments, such a hardeneddielectric material does not have to be formed as long as the shellmaterial 228 and the sacrificial dielectric material 226 are selected sothat it is possible to create a cavity in the shell material 228 in alater process (process 108, described below) by removing at least someof the sacrificial dielectric material 226. Furthermore, while FIG. 2Billustrates a substantially complete coverage of the structure 224, aswell as the surrounding area of the substrate 222, by the shell material228 because such implementation may be particularly advantageous fromthe fabrication perspective (e.g. because it's easier to cover theentire structure 224 in a single deposition process), in otherimplementations the shell material 228 does not cover the structure 224completely, i.e. the shell material 228 may have discontinuities so thatthere may be one or more openings in the shell material 228 encompassingthe structure 224, i.e. portions of the structure 224 may remain exposedthrough the shell material 228.

In various embodiments, the thickness of the shell material 228 providedin the process 108 may be between about 5 and 100 nm, including allvalues and ranges therein, e.g. between 20 and 80 nm, or between 50 and75 nm. For the implementations when the hardened dielectric 230 isformed, a thickness of the hardened dielectric 230 may be between about5 and 100 nm, including all values and ranges therein, e.g. betweenabout 10 and 30 nm, or between about 15 and 20 nm.

The method 100 may then proceed with a process 106 of creating anetch/deposition opening in the shell material (and in the hardeneddielectric material, in case such a material was formed) for removing atleast some of the sacrificial dielectric material of the structure 224to form a cavity in a later process and for depositing other materialsin the cavity thereafter. An exemplary result of the process 106 isillustrated in FIG. 2C with a device assembly 206-1 for the firstembodiment and a device assembly 206-2 for the second embodiment, ineach of which showing that the upper portions of the shell material 228and the hardened dielectric 230 are removed so that an upper surface 232of the original sacrificial dielectric material 226 is exposed.

In various embodiments, such an opening may be created using anysuitable technique which would depend on the type of the shell material(and on the type of the hardened dielectric material, in case such amaterial was formed). In some embodiments, such an opening may becreated by gently polishing off the upper portions of the shell material(and in the hardened dielectric material, in case such a material wasformed) until the upper surface 232 of the sacrificial dielectric 226 isexposed. Additionally or alternatively, in some embodiments, dry etchwith e.g. chlorine (Cl2) and boron trichloride (BCl3) chemistry inreactive ion etch (RIE) process may be used to form an etch/depositionopening in the process 106.

Next, the method 100 may proceed with a process 108 of etching, via theopening created in the process 106, at least some of the sacrificialdielectric material 226 to form a cavity. An exemplary result of theprocess 108 is illustrated in FIG. 2D with a device assembly 208-1 forthe first embodiment and a device assembly 208-2 for the secondembodiment, in each of which showing all of the sacrificial dielectricmaterial 226 removed to form a cavity 234 in the shell material 228 andthe hardened dielectric 230. In other embodiments (not specificallyshown in FIGS.), some of the sacrificial dielectric material 226 mayremain in the cavity 234, e.g. on the sidewalls of the cavity 234.

Any suitable etching techniques for removing the sacrificial dielectricmaterial 226 without substantially removing the shell material 228 orthe hardened dielectric 230 may be used in the process 108. In someembodiments, the etch of the process 108 may advantageously include anisotropic etch (i.e. a process that etches in multiple directions, bothvertically and horizontally), such as e.g. an isotropic wet etch. Anysubstance suitable for isotropically etching the sacrificial material226 may be used in the process 108. In various embodiments, an etchantmay be e.g. corrosive liquid, such as e.g. hydrofluoric acid (HF) or achemically active ionized gas (i.e. plasma).

Provided that substantially all of the sacrificial material 226 isetched out in the process 108, the shape and dimensions of the resultingcavity 234 will be those defined by the shell 228 and the hardeneddielectric 230. In some embodiments, the cavity 234 may have a height(i.e. a dimension measured along the z-axis of the coordinate systemshown in FIGS. 2A-2H) between about 100 and 5000 nm, including allvalues and ranges therein, e.g. between about 200 and 3000 nm, orbetween about 500 and 2000 nm, and a width (i.e. a dimension measuredalong the y-axis of the coordinate system shown in FIGS. 2A-2H, for thecylindrical capacitors—the diameter of the cylindrical cavity) betweenabout 5 and 50 nm, including all values and ranges therein, e.g. betweenabout 10 and 40 nm, or between about 20 and 30 nm.

The method 100 may then proceed with a process 110 of providing thefirst of the two capacitor electrodes within the cavity formed in theprocess 108. An exemplary result of the process 110 is illustrated inFIG. 2E with a device assembly 210-1 for the first embodiment and adevice assembly 210-2 for the second embodiment. Each of the first andsecond embodiments shown in FIG. 2E illustrate that an electricallyconductive material 236 is deposited within the cavity 234 to form thefirst electrode, however, the first and second embodiments differ in thegeometry of such an electrode. Namely, according to the firstembodiment, the first electrode occupies substantially the entire cavity234, while the first electrode according to the second embodiment isprovided only along the inner sidewalls and bottom of the cavity 234,leaving a smaller cavity 238 (shown in the device assembly 210-2)substantially in the center of the cavity 234 that was formed in theprocess 108. In other words, the first electrode according to the secondembodiment is provided as a conformal liner of the electricallyconductive material 236 on the inner sidewalls and bottom of the cavity234.

Thus, for the first embodiment shown with the device assembly 210-1, thefirst electrode of the conductive material 236 has substantially theshape of the original 3D structure 224, but of slightly smallerdimensions when the hardened dielectric layer 230 is present. Such anelectrode may be formed using any suitable techniques for uniformlydepositing conductive materials into openings, such as e.g. ALD, CVD,PECVD, or/and PVD processes such as e.g. sputter.

On the other hand, for the second embodiment shown with the deviceassembly 210-2, a thickness of the first capacitor electrode of theconductive material 236 (i.e. a dimension measured along the y-axis ofthe coordinate system shown in FIGS. 2A-2H) may be between about 5 and50 nm, including all values and ranges therein, e.g. between about 10and 40 nm, or between about 20 and 30 nm. Such an electrode may beformed using any suitable techniques for conformally depositingconductive materials onto selected surfaces, such as e.g. ALD, CVD,PECVD, or/and PVD processes such as e.g. sputter.

The differences in the shape of the first electrode provided in theprocess 110 according to the first and second embodiments are due to thedifferences of the final non-planar capacitors fabricated using thecavity fill method as described herein, which differences are describedin greater detail below with reference to both capacitor electrodes aswell as a capacitor insulator f such capacitors.

Turning back to the method 100, a process 112 may include an optionalprocess of removing the excess of the shell material deposited onsurfaces besides the surfaces of the 3D structure 224 (i.e. on thehorizontal surfaces of the substrate) as a part of the process 104. Anexemplary result of the process 112 is illustrated in FIG. 2F with adevice assembly 212-1 for the first embodiment and a device assembly212-2 for the second embodiment, illustrating that the shell material228 is removed from the surfaces 240 of the substrate 222. While theprocess 112 is shown in FIG. 1 and in the illustrations of FIGS. 2A-2Has following the process 110, in other embodiments, the process 112 maybe performed at any time before the process 110 from the time theprocess 104 has been performed (i.e. at any time after the shellmaterial 228 is deposited). In various embodiments, removing the excessshell material 228 to expose the surfaces 240 may be performed by e.g. awet etch process, e.g. using hydrofluoric acid (HF).

The process 112 is described herein as optional because, in someembodiments, the shell material 228 may be left on the surfaces 240 ofthe substrate 222 and the method 100 may continue with such surfaces. Insuch embodiments, FIGS. 2G-2H would be modified accordingly to stillshow the shell material 228 on the surfaces 240 (as in FIG. 2E), all ofwhich embodiments are within the scope of the present disclosure.Another reason the process 112 is optional is that, in some embodiments,deposition of the shell material 228 in the process 104 may be such thatthe excess of the shell material 228 is not left on the surfaces 240 ofthe substrate 222, e.g. because such surfaces are masked prior todepositing the shell material 228 in the process 104. In suchembodiments, FIGS. 2B-2E would be modified accordingly to not have theshell material 228 on the surfaces 240 (as in FIG. 2F), all of whichembodiments are within the scope of the present disclosure.

The method 100 may then proceed with a process 114 of providing thesecond of the two capacitor electrodes, the second electrode separatedfrom the first electrode formed in the process 110 by a capacitorinsulator. An exemplary result of the process 114 is illustrated in FIG.2G with a device assembly 214-1 for the first embodiment and a deviceassembly 214-2 for the second embodiment. Each of the first and secondembodiments shown in FIG. 2G illustrate that an electrically conductivematerial 242 is deposited to form the second electrode, however, thefirst and second embodiments differ in the geometry of such an electrodedue to the differences of the final non-planar capacitors fabricatedusing the cavity fill method as described herein (and due to thedifferences in the geometry of the first electrode).

Namely, for the first embodiment, as shown with the device assembly214-1, the first electrode 236 (i.e. the electrode made of theelectrically conductive material 236) is an inner electrode of anon-planar capacitor, the second electrode 242 (i.e. the electrode madeof the electrically conductive material 242) is an outer electrode ofthe non-planar capacitor (because the second electrode 242 encompassesthe first electrode 236 in such an embodiment), while the shell material228 as well as the hardened dielectric 230, in case such material layeris present, form the capacitor insulator of the non-planar capacitor. Onthe other hand, for the second embodiment, as shown with the deviceassembly 214-2, the first electrode 236 is an outer electrode of anon-planar capacitor, the second electrode 242 is an inner electrode ofthe non-planar capacitor (because the first electrode 236 encompassesthe second electrode 242 in such an embodiment), while another material244 is provided as the capacitor insulator. In such an embodiment, theshell material 228 as well as the hardened dielectric 230, in case suchmaterial layer is present, just serve to form a cavity inside which theentire non-planar capacitor is provided and do not serve as thecapacitor insulator materials as in the first embodiment.

Turning to the details of the first embodiment, as shown with the deviceassembly 214-1 in FIG. 2G, the capacitor insulator may be a dielectricstack of the shell material 228 that includes aluminum and nitrogen(e.g. AlN) and the hardened dielectric 230. Such a capacitor insulatoris provided between, and maybe in contact with, on each respective side,the first (inner) electrode 236 and the second (outer) electrode 242.Thus, the second electrode 242 encompasses and may be in contact withthe shell material 228, the shell material 228 encompasses and may be incontact with the hardened dielectric 230, and the hardened dielectric230 encompasses and may be in contact with the first electrode 236. Insuch an embodiment, a surface area of a transverse cross-section of thefirst capacitor electrode 236 (i.e. the dimension measured in the x-yplane of the coordinate system shown in FIGS. 2A-2H) may be betweenabout 25 and 2500 square nm (nm2), including all values and rangestherein, e.g. between about 100 and 1600 nm2, or between about 400 and900 nm2. For example, for a cylindrical capacitor where the firstcapacitor electrode 236 is the core of the cylindrical structure, adiameter of the first capacitor electrode 236 may be between about 5 and55 nm, including all values and ranges therein, e.g. between about 11and 45 nm, or between about 12 and 34 nm. In another example, for asquare prism capacitor where the first capacitor electrode 236 is thecore of the square prism structure, a side length of the square thatforms the first capacitor electrode 236 may be between about 5 and 50nm, including all values and ranges therein, e.g. between about 10 and40 nm, or between about 20 and 30 nm. In different variations of thefirst embodiment, a thickness of the second capacitor electrode 242 maybe between about 5 and 50 nm, including all values and ranges therein,e.g. between about 10 and 40 nm, or between about 20 and 30 nm.

In the first embodiment, the second capacitor electrode 242 may befabricated using any of the conformal deposition techniques describedabove, such as e.g. ALD, CVD, PECVD, or/and PVD processes such as e.g.sputter, so that the electrically conductive material 242 is providedsubstantially only on the outer sidewalls of the shell material 228structure.

Turning to the details of the second embodiment, as shown with thedevice assembly 214-2 in FIG. 2G, the capacitor insulator 244 may beprovided conformally on the inner sidewalls and the bottom of the cavity238 (e.g. as a liner lining the inner sidewalls of the cavity 238), andthe second capacitor electrode 242 is subsequently provided to fill theremaining open volume of the cavity (i.e. remaining volume after thedeposition of a liner of the capacitor insulator 244). Thus, in thisembodiment, the capacitor insulator 244 is still provided between, andmaybe in contact with, on each respective side, the first electrode 236and the second electrode 242, as in the first embodiment, but now thefirst electrode 236 encompasses and may be in contact with the capacitorinsulator 244, and the capacitor insulator 244 encompasses and may be incontact with the second electrode 242. In such an embodiment, athickness of the capacitor insulator 244 may be between about 2 and 15nm, including all values and ranges therein, e.g. between about 3 and 10nm, or between about 5 and 8 nm, while a surface area of a transversecross-section of the second capacitor electrode 242 (i.e. the dimensionmeasured in the x-y plane of the coordinate system shown in FIGS. 2A-2H)may be between about 25 and 1600 nm2, including all values and rangestherein, e.g. between about 100 and 1600 nm2, or between about 400 and900 nm2. For example, for a cylindrical capacitor where the secondcapacitor electrode 242 is the core of the cylindrical structure, adiameter of the second capacitor electrode may be between about 5 and 45nm, including all values and ranges therein, e.g. between about 11 and34 nm. In another example, for a square prism capacitor where the secondcapacitor electrode 242 is the core of the square prism structure, aside length of the square that forms the second capacitor electrode 242may be between about 10 and 40 nm, including all values and rangestherein, e.g. between about 20 and 30 nm.

Since the non-planar capacitor formed according to the second embodimentas shown with the device assembly 214-2 of FIG. 2G includes a designatedlayer of a material serving as the capacitor insulator 244, such acapacitor may be fabricated as a ferroelectric capacitor, as e.g. usedin certain memory applications. In such embodiments, the capacitorinsulator 244 would include one or more thin-film ferroelectricmaterials (i.e. materials exhibiting ferroelectric behavior at thindimensions), such as e.g. hafnium zirconium oxide (HfZrO, also referredto as HZO, i.e. a material which includes hafnium, zirconium, andoxygen), silicon-doped (Si-doped) hafnium oxide (i.e. a material thatincludes hafnium, oxygen, and silicon), germanium-doped (Ge-doped)hafnium oxide (i.e. a material that includes hafnium, oxygen, andgermanium), aluminum-doped (Al-doped) hafnium oxide (i.e. a materialthat includes hafnium, oxygen, and aluminum), and yttrium-doped(Y-doped) hafnium oxide (i.e. a material that includes hafnium, oxygen,and yttrium).

In case the non-planar capacitor of the second embodiment is notferroelectric, the capacitor insulator 244 may include any of the knowndielectric materials which do not exhibit ferroelectric behavior, suchas e.g. any of the high-k dielectric materials including elements suchas hafnium, silicon, oxygen, titanium, tantalum, lanthanum, aluminum,zirconium, barium, strontium, yttrium, lead, scandium, niobium, andzinc. Examples of high-k materials that may be used in the capacitorinsulator 244 may include, but are not limited to, hafnium oxide,hafnium silicon oxide, lanthanum oxide, lanthanum aluminum oxide,zirconium oxide, zirconium silicon oxide, tantalum oxide, titaniumoxide, barium strontium titanium oxide, barium titanium oxide, strontiumtitanium oxide, yttrium oxide, aluminum oxide, tantalum oxide, tantalumsilicon oxide, lead scandium tantalum oxide, and lead zinc niobate. Insome embodiments, an annealing process may be carried out on thecapacitor insulator 244 during manufacture of the non-planar capacitorof the device assembly 214-2 to improve the quality of the capacitorinsulator 244.

In the second embodiment, the capacitor insulator 244 may be fabricatedusing any of suitable conformal deposition techniques for depositing thematerial of the capacitor insulator, such as e.g. ALD, CVD, PECVD,or/and PVD processes such as e.g. sputter, so that the capacitorinsulator 244 is provided substantially only on the inner sidewalls ofthe cavity formed by the first electrode 236. The second capacitorelectrode 242 may then be fabricated using any of the fill depositiontechniques described above, such as e.g. ALD, CVD, PECVD, or/and PVDprocesses such as e.g. sputter, so that the electrically conductivematerial 242 fills the cavity defined by the capacitor insulator 244.

In various embodiments, the electrically conductive material 242 of thesecond electrode could be the same or different material as theelectrically conductive material 236 of the first electrode. In general,in various embodiments, each of the electrically conductive materialsdescribed herein, e.g. the electrically conductive materials 236 and242, may include any suitable electrically conductive material, alloy,or a stack of multiple electrically conductive materials. In someembodiments, various electrically conductive materials described hereinmay include one or more metals or metal alloys, with metals such as e.g.ruthenium, palladium, platinum, cobalt, nickel, hafnium, zirconium,titanium, tantalum, and aluminum. In some embodiments, variouselectrically conductive materials described herein may include one ormore electrically conductive alloys, oxides (i.e. conductive metaloxides), carbides (e.g., hafnium carbide, zirconium carbide, titaniumcarbide, tantalum carbide, and aluminum carbide), or nitrides (e.g.hafnium nitride, zirconium nitride, titanium nitride, tantalum nitride,and aluminum nitride) of one or more metals.

Only for the second embodiment shown in FIGS. 2A-2H, the method 100 maythen proceed with a process 116 of removing the shell material. Thehardened dielectric 230 may be removed as well. An exemplary result ofthe process 116 is illustrated in FIG. 2H with a device assembly 216-2for the second embodiment illustrating that the shell material 228 andthe hardened dielectric 230 have been removed. In various embodiments,the shell material 228 and the hardened dielectric 230 may be removedusing wet etch, dry etch, or a suitable combination of wet etch and dryetch. For example, a wet etch can be performed using potassium hydroxide(KOH), tetramethylammonium hydroxide (TMAH) or hydrofluoric acid (HF)based chemistries, while dry etch can be performed using chlorine gas(e.g. Cl2), and boron trichloride (BCl3) type chemistries in RIE.

In various embodiments, the non-planar capacitors according to any ofthe embodiments described herein, e.g. the non-planar capacitor of thedevice assembly 214-1 shown in FIG. 2G, the non-planar capacitor of thedevice assembly 214-2 shown in FIG. 2G, or the non-planar capacitor ofthe device assembly 216-2 shown in FIG. 2H may have an AR (i.e. a ratioof a height of the capacitor and the largest transverse dimension of thecapacitor) that is higher than about 10, e.g. higher than 15 or higherthan 20.

In some embodiments, the final non-planar capacitors according to any ofthe embodiments described herein, e.g. the non-planar capacitor of thedevice assembly 214-1 shown in FIG. 2G, the non-planar capacitor of thedevice assembly 214-2 shown in FIG. 2G, or the non-planar capacitor ofthe device assembly 216-2 shown in FIG. 2H may be surrounded by a gatespacer, not specifically shown in FIGS. 2G and 2H, configured to provideseparation between the different capacitors and/or between thenon-planar capacitor and other IC components disposed in the vicinity ofthe non-planar capacitor. Such a spacer may be made of a low-kdielectric material (i.e. a dielectric material that has a lowerdielectric constant (k) than silicon dioxide). Examples of low-kmaterials that may be used in such a dielectric spacer may include, butare not limited to, fluorine-doped silicon dioxide, carbon-doped silicondioxide, spin-on organic polymeric dielectrics such as e.g. polyimide,polynorbornenes, benzocyclobutene, and polytetrafluoroethylene (PTFE),or spin-on silicon-based polymeric dielectric such as e.g. hydrogensilsesquioxane (HSQ) and methylsilsesquioxane (MSQ)). Other examples oflow-k materials that may be used in a dielectric spacer include variousporous dielectric materials, such as for example porous silicon dioxideor porous carbon-doped silicon dioxide, where large voids or pores arecreated in a dielectric in order to reduce the overall dielectricconstant of the layer, since voids can have a dielectric constant ofnearly 1.

The device assemblies illustrated in FIGS. 2A-2H do not represent anexhaustive set of assemblies in which non-planar capacitors formed usinga cavity fill method as described herein may be implemented, but merelyprovide examples of such structures/assemblies. Although particulararrangements of materials are discussed with reference to FIGS. 2A-2H,intermediate materials may be included in the assemblies of these FIGS.Note that FIGS. 2A-2H are intended to show relative arrangements of theelements therein, and that device assemblies of these FIGS. may includeother elements that are not specifically illustrated (e.g., variousinterfacial layers). Additionally, although some elements of the deviceassemblies are illustrated in FIGS. 2A-2H as being planar rectangles orformed of rectangular solids, this is simply for ease of illustration,and embodiments of these assemblies may be curved, rounded, or otherwiseirregularly shaped as dictated by, and sometimes inevitable due to, themanufacturing processes used to fabricate semiconductor deviceassemblies.

Inspection of layout and mask data and reverse engineering of parts of adevice to reconstruct the circuit using e.g. optical microscopy, TEM, orSEM, and/or inspection of a cross-section of a device to detect theshape and the location of various device elements described herein usinge.g. Physical Failure Analysis (PFA) would allow determination of thenon-planar capacitors formed using a cavity fill method as describedherein.

The device assemblies having one or more non-planar capacitors formedvia cavity fill as disclosed herein may be included in any suitableelectronic device. FIGS. 3A-6 illustrate various examples of apparatusesthat may include one or more device assemblies implementing non-planarcapacitors formed using a cavity fill method, as disclosed herein.

FIGS. 3A-3B are top views of a wafer 2000 and dies 2002 that may includeone or more non-planar capacitors formed using the cavity fill method inaccordance with any of the embodiments disclosed herein. The wafer 2000may be composed of semiconductor material and may include one or moredies 2002 having IC structures formed on a surface of the wafer 2000.Each of the dies 2002 may be a repeating unit of a semiconductor productthat includes any suitable IC (e.g., ICs including one or morenon-planar capacitors as shown e.g. in the device assemblies 214-1,214-2, or 216-2, or any other components where non-planar capacitors maybe formed using a cavity fill method as described herein). After thefabrication of the semiconductor product is complete (e.g., aftermanufacture of one or more device assemblies 214-1, 214-2, or 216-2, orany other components where non-planar capacitors may be formed using acavity fill method as described herein), the wafer 2000 may undergo asingulation process in which each of the dies 2002 is separated from oneanother to provide discrete “chips” of the semiconductor product. Inparticular, devices that include one or more semiconductor deviceassemblies implementing non-planar capacitors formed using a cavity fillmethod as disclosed herein may take the form of the wafer 2000 (e.g.,not singulated) or the form of the die 2002 (e.g., singulated). The die2002 may include one or more transistors (e.g., one or more of thetransistors 2140 of FIG. 4, discussed below), and/or supportingcircuitry to route electrical signals to the transistors, as well as anyother IC components. In some embodiments, the wafer 2000 or the die 2002may include a memory device (e.g., a static random access memory (SRAM)device), a logic device (e.g., an AND, OR, NAND, or NOR gate), or anyother suitable circuit element. Multiple ones of these devices may becombined on a single die 2002. For example, a memory array formed bymultiple memory devices may be formed on a same die 2002 as a processingdevice (e.g., the processing device 2302 of FIG. 6) or other logic thatis configured to store information in the memory devices or executeinstructions stored in the memory array.

FIG. 4 is a cross-sectional side view of an IC device 2100 that mayinclude one or more non-planar capacitors formed using the cavity fillmethod in accordance with any of the embodiments disclosed herein. TheIC device 2100 may be formed on a substrate 2102 (e.g., the wafer 2000of FIG. 3A) and may be included in a die (e.g., the die 2002 of FIG.3B). The substrate 2102 may be a semiconductor substrate composed ofsemiconductor material systems including, for example, N-type or P-typematerials systems. The substrate 2102 may include, for example, acrystalline substrate formed using a bulk silicon or asilicon-on-insulator substructure. In some embodiments, thesemiconductor substrate 2102 may be formed using alternative materials,which may or may not be combined with silicon, that include, but are notlimited to, germanium, indium antimonide, lead telluride, indiumarsenide, indium phosphide, gallium arsenide, or gallium antimonide.Further materials classified as group II-VI, III-V, or IV may also beused to form the substrate 2102. Although a few examples of materialsfrom which the substrate 2102 may be formed are described here, anymaterial that may serve as a foundation for an IC device 2100 may beused. The substrate 2102 may be part of a singulated die (e.g., the dies2002 of FIG. 3B) or a wafer (e.g., the wafer 2000 of FIG. 3A).

The IC device 2100 may include one or more device layers 2104 disposedon the substrate 2102. The device layer 2104 may include features of oneor more transistors 2140 (e.g., metal oxide semiconductor field-effecttransistors (MOSFETs)) formed on the substrate 2102. The device layer2104 may include, for example, one or more source and/or drain (S/D)regions 2120, a gate 2122 to control current flow in the transistors2140 between the S/D regions 2120, and one or more S/D contacts 2124 toroute electrical signals to/from the S/D regions 2120. Although notspecifically shown in FIG. 4, the IC device may implement non-planarcapacitors formed using a cavity fill method as described herein, e.g.as described with reference to the device assemblies 214-216. The S/Dregions 2120 may be formed either adjacent to or at a distance from thegate 2122 of each transistor 2140, using any suitable processes known inthe art, some of which are described above. The transistors 2140 mayinclude additional features not depicted for the sake of clarity, suchas additional device isolation regions, gate contacts, and the like. Thetransistors 2140 are not limited to the type and configuration depictedin FIG. 4 and may include a wide variety of other types andconfigurations such as, for example, planar transistors, non-planartransistors, or a combination of both. Non-planar transistors mayinclude FinFET transistors, such as double-gate transistors or FinFETs,and wrap-around or all-around gate transistors, such as nanoribbon andnanowire transistors.

Each transistor 2140 may include a gate 2122 formed of at least twolayers, a gate dielectric layer and a gate electrode layer.

The gate dielectric layer may include one layer or a stack of layers.The one or more layers may include silicon oxide, silicon dioxide (SiO2)and/or a high-k dielectric material. The high-k dielectric material mayinclude elements such as hafnium, silicon, oxygen, titanium, tantalum,lanthanum, aluminum, zirconium, barium, strontium, yttrium, lead,scandium, niobium, and zinc. Examples of high-k materials that may beused in the gate dielectric layer include, but are not limited to,hafnium oxide, hafnium silicon oxide, lanthanum oxide, lanthanumaluminum oxide, zirconium oxide, zirconium silicon oxide, tantalumoxide, titanium oxide, barium strontium titanium oxide, barium titaniumoxide, strontium titanium oxide, yttrium oxide, aluminum oxide, leadscandium tantalum oxide, and lead zinc niobate. In some embodiments, anannealing process may be carried out on the gate dielectric layer toimprove its quality when a high-k material is used.

The gate electrode layer is formed on the gate dielectric layer and mayinclude at least one P-type workfunction metal or N-type workfunctionmetal, depending on whether the transistor is to be a PMOS or an NMOStransistor. In some implementations, the gate electrode layer mayinclude a stack of two or more metal layers, where one or more metallayers are workfunction metal layers and at least one metal layer is afill metal layer. Further metal layers may be included for otherpurposes, such as a barrier layer.

For a PMOS transistor, metals that may be used for the gate electrodeinclude, but are not limited to, ruthenium, palladium, platinum, cobalt,nickel, and conductive metal oxides, e.g., ruthenium oxide. A P-typemetal layer will enable the formation of a PMOS gate electrode with aworkfunction that is between about 4.9 eV and about 5.2 eV. For an NMOStransistor, metals that may be used for the gate electrode include, butare not limited to, hafnium, zirconium, titanium, tantalum, aluminum,alloys of these metals, and carbides of these metals such as hafniumcarbide, zirconium carbide, titanium carbide, tantalum carbide, andaluminum carbide. An N-type metal layer will enable the formation of anNMOS gate electrode with a workfunction that is between about 3.9 eV andabout 4.2 eV.

In some embodiments, when viewed as a cross-section of the transistor2140 along the source-channel-drain direction, the gate electrode mayinclude a U-shaped structure that includes a bottom portionsubstantially parallel to the surface of the substrate and two sidewallportions that are substantially perpendicular to the top surface of thesubstrate (e.g., in a FinFET). In other embodiments, at least one of themetal layers that form the gate electrode may simply be a planar layerthat is substantially parallel to the top surface of the substrate anddoes not include sidewall portions substantially perpendicular to thetop surface of the substrate. In other embodiments, the gate electrodemay include a combination of U-shaped structures and planar,non-U-shaped structures. For example, the gate electrode may include oneor more U-shaped metal layers formed atop one or more planar,non-U-shaped layers. In some embodiments, the gate electrode may includea V-shaped structure (e.g., when the fin of a FinFET does not have a“flat” upper surface, but instead has a rounded peak).

In some embodiments, a pair of sidewall spacers may be formed onopposing sides of the gate stack to bracket the gate stack. The sidewallspacers may be formed from a material such as silicon nitride, siliconoxide, silicon carbide, silicon nitride doped with carbon, and siliconoxynitride. Processes for forming sidewall spacers are well known in theart and generally include deposition and etching process steps. In someembodiments, a plurality of spacer pairs may be used; for instance, twopairs, three pairs, or four pairs of sidewall spacers may be formed onopposing sides of the gate stack.

Electrical signals, such as power and/or input/output (I/O) signals, maybe routed to and/or from the transistors 2140 of the device layer 2104through one or more interconnect layers disposed on the device layer2104 (illustrated in FIG. 4 as interconnect layers 2106-2110). Forexample, electrically conductive features of the device layer 2104(e.g., the gate 2122 and the S/D contacts 2124) may be electricallycoupled with the interconnect structures 2128 of the interconnect layers2106-2110. The one or more interconnect layers 2106-2110 may form aninterlayer dielectric (ILD) stack 2119 of the IC device 2100.

The interconnect structures 2128 may be arranged within the interconnectlayers 2106-2110 to route electrical signals according to a wide varietyof designs (in particular, the arrangement is not limited to theparticular configuration of interconnect structures 2128 depicted inFIG. 4). Although a particular number of interconnect layers 2106-2210is depicted in FIG. 4, embodiments of the present disclosure include ICdevices having more or fewer interconnect layers than depicted.

In some embodiments, the interconnect structures 2128 may include trenchstructures 2128 a (sometimes referred to as “lines”) and/or viastructures 2128 b (sometimes referred to as “holes”) filled with anelectrically conductive material such as a metal. The trench structures2128 a may be arranged to route electrical signals in a direction of aplane that is substantially parallel with a surface of the substrate2102 upon which the device layer 2104 is formed. For example, the trenchstructures 2128 a may route electrical signals in a direction in and outof the page from the perspective of FIG. 4. The via structures 2128 bmay be arranged to route electrical signals in a direction of a planethat is substantially perpendicular to the surface of the substrate 2102upon which the device layer 2104 is formed. In some embodiments, the viastructures 2128 b may electrically couple trench structures 2128 a ofdifferent interconnect layers 2106-2110 together.

The interconnect layers 2106-2110 may include a dielectric material 2126disposed between the interconnect structures 2128, as shown in FIG. 4.In some embodiments, the dielectric material 2126 disposed between theinterconnect structures 2128 in different ones of the interconnectlayers 2106-2110 may have different compositions; in other embodiments,the composition of the dielectric material 2126 between differentinterconnect layers 2106-2110 may be the same.

A first interconnect layer 2106 (referred to as Metal 1 or “M1”) may beformed directly on the device layer 2104. In some embodiments, the firstinterconnect layer 2106 may include trench structures 2128 a and/or viastructures 2128 b, as shown. The trench structures 2128 a of the firstinterconnect layer 2106 may be coupled with contacts (e.g., the S/Dcontacts 2124) of the device layer 2104.

A second interconnect layer 2108 (referred to as Metal 2 or “M2”) may beformed directly on the first interconnect layer 2106. In someembodiments, the second interconnect layer 2108 may include viastructures 2128 b to couple the trench structures 2128 a of the secondinterconnect layer 2108 with the trench structures 2128 a of the firstinterconnect layer 2106. Although the trench structures 2128 a and thevia structures 2128 b are structurally delineated with a line withineach interconnect layer (e.g., within the second interconnect layer2108) for the sake of clarity, the trench structures 2128 a and the viastructures 2128 b may be structurally and/or materially contiguous(e.g., simultaneously filled during a dual-damascene process) in someembodiments.

A third interconnect layer 2110 (referred to as Metal 3 or “M3”) (andadditional interconnect layers, as desired) may be formed in successionon the second interconnect layer 2108 according to similar techniquesand configurations described in connection with the second interconnectlayer 2108 or the first interconnect layer 2106.

The IC device 2100 may include a solder resist material 2134 (e.g.,polyimide or similar material) and one or more bond pads 2136 formed onthe interconnect layers 2106-2110. The bond pads 2136 may beelectrically coupled with the interconnect structures 2128 andconfigured to route the electrical signals of the transistor(s) 2140 toother external devices. For example, solder bonds may be formed on theone or more bond pads 2136 to mechanically and/or electrically couple achip including the IC device 2100 with another component (e.g., acircuit board). The IC device 2100 may have other alternativeconfigurations to route the electrical signals from the interconnectlayers 2106-2110 than depicted in other embodiments. For example, thebond pads 2136 may be replaced by or may further include other analogousfeatures (e.g., posts) that route the electrical signals to externalcomponents.

FIG. 5 is a cross-sectional side view of an IC device assembly 2200 thatmay include one or more non-planar capacitors formed using the cavityfill method in accordance with any of the embodiments disclosed herein.The IC device assembly 2200 includes a number of components disposed ona circuit board 2202 (which may be, e.g., a motherboard). The IC deviceassembly 2200 includes components disposed on a first face 2240 of thecircuit board 2202 and an opposing second face 2242 of the circuit board2202; generally, components may be disposed on one or both faces 2240and 2242. In particular, any suitable ones of the components of the ICdevice assembly 2200 may include any of the semiconductor deviceassemblies implementing non-planar capacitors formed using a cavity fillmethod in accordance with any of the embodiments disclosed herein.

In some embodiments, the circuit board 2202 may be a printed circuitboard (PCB) including multiple metal layers separated from one anotherby layers of dielectric material and interconnected by electricallyconductive vias. Any one or more of the metal layers may be formed in adesired circuit pattern to route electrical signals (optionally inconjunction with other metal layers) between the components coupled tothe circuit board 2202. In other embodiments, the circuit board 2202 maybe a non-PCB substrate.

The IC device assembly 2200 illustrated in FIG. 5 includes apackage-on-interposer structure 2236 coupled to the first face 2240 ofthe circuit board 2202 by coupling components 2216. The couplingcomponents 2216 may electrically and mechanically couple thepackage-on-interposer structure 2236 to the circuit board 2202, and mayinclude solder balls (as shown in FIG. 5), male and female portions of asocket, an adhesive, an underfill material, and/or any other suitableelectrical and/or mechanical coupling structure.

The package-on-interposer structure 2236 may include an IC package 2220coupled to an interposer 2204 by coupling components 2218. The couplingcomponents 2218 may take any suitable form for the application, such asthe forms discussed above with reference to the coupling components2216. Although a single IC package 2220 is shown in FIG. 5, multiple ICpackages may be coupled to the interposer 2204; indeed, additionalinterposers may be coupled to the interposer 2204. The interposer 2204may provide an intervening substrate used to bridge the circuit board2202 and the IC package 2220. The IC package 2220 may be or include, forexample, a die (the die 2002 of FIG. 3B), an IC device (e.g., the ICdevice 2100 of FIG. 4), or any other suitable component. Generally, theinterposer 2204 may spread a connection to a wider pitch or reroute aconnection to a different connection. For example, the interposer 2204may couple the IC package 2220 (e.g., a die) to a ball grid array (BGA)of the coupling components 2216 for coupling to the circuit board 2202.In the embodiment illustrated in FIG. 5, the IC package 2220 and thecircuit board 2202 are attached to opposing sides of the interposer2204; in other embodiments, the IC package 2220 and the circuit board2202 may be attached to a same side of the interposer 2204. In someembodiments, three or more components may be interconnected by way ofthe interposer 2204.

The interposer 2204 may be formed of an epoxy resin, afiberglass-reinforced epoxy resin, a ceramic material, or a polymermaterial such as polyimide. In some implementations, the interposer 2204may be formed of alternate rigid or flexible materials that may includethe same materials described above for use in a semiconductor substrate,such as silicon, germanium, and other group III-V and group IVmaterials. The interposer 2204 may include metal interconnects 2208 andvias 2210, including but not limited to through-silicon vias (TSVs)2206. The interposer 2204 may further include embedded devices 2214,including both passive and active devices. Such devices may include, butare not limited to, capacitors, decoupling capacitors, resistors,inductors, fuses, diodes, transformers, sensors, electrostatic discharge(ESD) devices, and memory devices. More complex devices such as RFdevices, power amplifiers, power management devices, antennas, arrays,sensors, and microelectromechanical systems (MEMS) devices may also beformed on the interposer 2204. The package-on-interposer structure 2236may take the form of any of the package-on-interposer structures knownin the art.

The IC device assembly 2200 may include an IC package 2224 coupled tothe first face 2240 of the circuit board 2202 by coupling components2222. The coupling components 2222 may take the form of any of theembodiments discussed above with reference to the coupling components2216, and the IC package 2224 may take the form of any of theembodiments discussed above with reference to the IC package 2220.

The IC device assembly 2200 illustrated in FIG. 5 includes apackage-on-package structure 2234 coupled to the second face 2242 of thecircuit board 2202 by coupling components 2228. The package-on-packagestructure 2234 may include an IC package 2226 and an IC package 2232coupled together by coupling components 2230 such that the IC package2226 is disposed between the circuit board 2202 and the IC package 2232.The coupling components 2228 and 2230 may take the form of any of theembodiments of the coupling components 2216 discussed above, and the ICpackages 2226 and 2232 may take the form of any of the embodiments ofthe IC package 2220 discussed above. The package-on-package structure2234 may be configured in accordance with any of the package-on-packagestructures known in the art.

FIG. 6 is a block diagram of an example computing device 2300 that mayinclude one or more non-planar capacitors formed using the cavity fillmethod in accordance with any of the embodiments disclosed herein. Forexample, any suitable ones of the components of the computing device2300 may include a die (e.g., the die 2002 shown in FIG. 3B) havingdevice components, such as e.g. memory devices or RF power amplifiers,which use non-planar capacitors formed using a cavity fill method inaccordance with any of the embodiments disclosed herein. Any one or moreof the components of the computing device 2300 may include, or beincluded in, an IC device 2100 (FIG. 4). Any one or more of thecomponents of the computing device 2300 may include, or be included in,an IC device assembly 2200 (FIG. 5).

A number of components are illustrated in FIG. 6 as included in thecomputing device 2300, but any one or more of these components may beomitted or duplicated, as suitable for the application. In someembodiments, some or all of the components included in the computingdevice 2300 may be attached to one or more motherboards. In someembodiments, some or all of these components are fabricated onto asingle System-on-a-Chip (SoC) die.

Additionally, in various embodiments, the computing device 2300 may notinclude one or more of the components illustrated in FIG. 6, but thecomputing device 2300 may include interface circuitry for coupling tothe one or more components. For example, the computing device 2300 maynot include a display device 2306, but may include display deviceinterface circuitry (e.g., a connector and driver circuitry) to which adisplay device 2306 may be coupled. In another set of examples, thecomputing device 2300 may not include an audio input device 2318 or anaudio output device 2308, but may include audio input or output deviceinterface circuitry (e.g., connectors and supporting circuitry) to whichan audio input device 2318 or audio output device 2308 may be coupled.

The computing device 2300 may include a processing device 2302 (e.g.,one or more processing devices). As used herein, the term “processingdevice” or “processor” may refer to any device or portion of a devicethat processes electronic data from registers and/or memory to transformthat electronic data into other electronic data that may be stored inregisters and/or memory. The processing device 2302 may include one ormore digital signal processors (DSPs), application-specific integratedcircuits (ASICs), central processing units (CPUs), graphics processingunits (GPUs), cryptoprocessors (specialized processors that executecryptographic algorithms within hardware), server processors, or anyother suitable processing devices. The computing device 2300 may includea memory 2304, which may itself include one or more memory devices suchas volatile memory (e.g., dynamic random access memory (DRAM)),nonvolatile memory (e.g., read-only memory (ROM)), flash memory,solid-state memory, and/or a hard drive. In some embodiments, the memory2304 may include memory that shares a die with the processing device2302. This memory may be used as cache memory and may include embeddeddynamic random access memory (eDRAM) or spin transfer torque magneticrandom access memory (STT-MRAM).

In some embodiments, the computing device 2300 may include acommunication chip 2312 (e.g., one or more communication chips). Forexample, the communication chip 2312 may be configured for managingwireless communications for the transfer of data to and from thecomputing device 2300. The term “wireless” and its derivatives may beused to describe circuits, devices, systems, methods, techniques,communications channels, etc., that may communicate data through the useof modulated electromagnetic radiation through a nonsolid medium. Theterm does not imply that the associated devices do not contain anywires, although in some embodiments they might not.

The communication chip 2312 may implement any of a number of wirelessstandards or protocols, including but not limited to Institute forElectrical and Electronic Engineers (IEEE) standards including Wi-Fi(IEEE 802.11 family), IEEE 802.16 standards (e.g., IEEE 802.16-2005Amendment), Long-Term Evolution (LTE) project along with any amendments,updates, and/or revisions (e.g., advanced LTE project, ultramobilebroadband (UMB) project (also referred to as “3GPP2”), etc.). IEEE802.16 compatible Broadband Wireless Access (BWA) networks are generallyreferred to as WiMAX networks, an acronym that stands for WorldwideInteroperability for Microwave Access, which is a certification mark forproducts that pass conformity and interoperability tests for the IEEE802.16 standards. The communication chip 2312 may operate in accordancewith a Global System for Mobile Communication (GSM), General PacketRadio Service (GPRS), Universal Mobile Telecommunications System (UMTS),High Speed Packet Access (HSPA), Evolved HSPA (E-HSPA), or LTE network.The communication chip 2312 may operate in accordance with Enhanced Datafor GSM Evolution (EDGE), GSM EDGE Radio Access Network (GERAN),Universal Terrestrial Radio Access Network (UTRAN), or Evolved UTRAN(E-UTRAN). The communication chip 2312 may operate in accordance withCode Division Multiple Access (CDMA), Time Division Multiple Access(TDMA), Digital Enhanced Cordless Telecommunications (DECT),Evolution-Data Optimized (EV-DO), and derivatives thereof, as well asany other wireless protocols that are designated as 3G, 4G, 5G, andbeyond. The communication chip 2312 may operate in accordance with otherwireless protocols in other embodiments. The computing device 2300 mayinclude an antenna 2322 to facilitate wireless communications and/or toreceive other wireless communications (such as AM or FM radiotransmissions).

In some embodiments, the communication chip 2312 may manage wiredcommunications, such as electrical, optical, or any other suitablecommunication protocols (e.g., the Ethernet). As noted above, thecommunication chip 2312 may include multiple communication chips. Forinstance, a first communication chip 2312 may be dedicated toshorter-range wireless communications such as Wi-Fi or Bluetooth, and asecond communication chip 2312 may be dedicated to longer-range wirelesscommunications such as global positioning system (GPS), EDGE, GPRS,CDMA, WiMAX, LTE, EV-DO, or others. In some embodiments, a firstcommunication chip 2312 may be dedicated to wireless communications, anda second communication chip 2312 may be dedicated to wiredcommunications.

The computing device 2300 may include battery/power circuitry 2314. Thebattery/power circuitry 2314 may include one or more energy storagedevices (e.g., batteries or capacitors) and/or circuitry for couplingcomponents of the computing device 2300 to an energy source separatefrom the computing device 2300 (e.g., AC line power).

The computing device 2300 may include a display device 2306 (orcorresponding interface circuitry, as discussed above). The displaydevice 2306 may include any visual indicators, such as a heads-updisplay, a computer monitor, a projector, a touchscreen display, aliquid crystal display (LCD), a light-emitting diode display, or a flatpanel display, for example.

The computing device 2300 may include an audio output device 2308 (orcorresponding interface circuitry, as discussed above). The audio outputdevice 2308 may include any device that generates an audible indicator,such as speakers, headsets, or earbuds, for example.

The computing device 2300 may include an audio input device 2318 (orcorresponding interface circuitry, as discussed above). The audio inputdevice 2318 may include any device that generates a signalrepresentative of a sound, such as microphones, microphone arrays, ordigital instruments (e.g., instruments having a musical instrumentdigital interface (MIDI) output).

The computing device 2300 may include a GPS device 2316 (orcorresponding interface circuitry, as discussed above). The GPS device2316 may be in communication with a satellite-based system and mayreceive a location of the computing device 2300, as known in the art.

The computing device 2300 may include an other output device 2310 (orcorresponding interface circuitry, as discussed above). Examples of theother output device 2310 may include an audio codec, a video codec, aprinter, a wired or wireless transmitter for providing information toother devices, or an additional storage device.

The computing device 2300 may include an other input device 2320 (orcorresponding interface circuitry, as discussed above). Examples of theother input device 2320 may include an accelerometer, a gyroscope, acompass, an image capture device, a keyboard, a cursor control devicesuch as a mouse, a stylus, a touchpad, a bar code reader, a QuickResponse (QR) code reader, any sensor, or a radio frequencyidentification (RFID) reader.

The computing device 2300 may have any desired form factor, such as ahandheld or mobile computing device (e.g., a cell phone, a smart phone,a mobile internet device, a music player, a tablet computer, a laptopcomputer, a netbook computer, an ultrabook computer, a personal digitalassistant (PDA), an ultramobile personal computer, etc.), a desktopcomputing device, a server or other networked computing component, aprinter, a scanner, a monitor, a set-top box, an entertainment controlunit, a vehicle control unit, a digital camera, a digital videorecorder, or a wearable computing device. In some embodiments, thecomputing device 2300 may be any other electronic device that processesdata.

The following paragraphs provide various examples of the embodimentsdisclosed herein.

Example 1 provides a device assembly that includes a substrate and anon-planar capacitor provided over the substrate. The non-planarcapacitor includes a first capacitor electrode, a second capacitorelectrode, and a capacitor insulator between the first and secondcapacitor electrodes. At least one of the first and second capacitorelectrodes is shaped as a cylinder or a prism extending away from thesubstrate and being substantially perpendicular to the substrate, andthe first capacitor electrode is at least partially encompassed (i.e.surrounded) by a dielectric stack including a layer of a firstdielectric material (e.g. the hardened dielectric material as describedherein) and a layer of a second dielectric material, different from thefirst dielectric material, the second dielectric material including(e.g. being a compound of) aluminum and nitrogen, e.g. the seconddielectric material including (or being) AlN.

Example 2 provides the device assembly according to Example 1, where thefirst capacitor electrode is an inner electrode and the second capacitorelectrode is an outer electrode.

Example 3 provides the device assembly according to Example 2, where thedielectric stack is the capacitor insulator of the non-planar capacitor.

Example 4 provides the device assembly according to Examples 2 or 3,where the second capacitor electrode (i.e. the outer electrode in thisembodiment) at least partially encompasses (i.e. surrounds) thedielectric stack.

Example 5 provides the device assembly according to any one of Examples2-4, where the second capacitor electrode (i.e. the outer electrode inthis embodiment) is in contact with the second dielectric material (i.e.material including aluminum and nitrogen) of the dielectric stack.

Example 6 provides the device assembly according to any one of Examples2-5, where a surface area of a transverse cross-section of the firstcapacitor electrode (i.e. the inner electrode in this embodiment) isbetween about 25 and 2500 nm², including all values and ranges therein,e.g. between about 100 and 1600 nm², or between about 400 and 900 nm².

Example 7 provides the device assembly according to any one of Examples2-6, where a thickness of the second capacitor electrode (i.e. the outerelectrode in this embodiment) is between about 5 and 50 nm, includingall values and ranges therein, e.g. between about 10 and 40 nm, orbetween about 20 and 30 nm.

Example 8 provides the device assembly according to Example 1, where thefirst capacitor electrode is an outer electrode and the second capacitorelectrode is an inner electrode.

Example 9 provides the device assembly according to Example 8, where thefirst capacitor electrode (i.e. the outer electrode in this embodiment)at least partially encompasses (i.e. surrounds) the second capacitorelectrode (i.e. the inner electrode in this embodiment).

Example 10 provides the device assembly according to Examples 8 or 9,where the first capacitor electrode (i.e. the outer electrode in thisembodiment) at least partially encompasses (i.e. surrounds) thecapacitor insulator, and the capacitor insulator at least partiallyencompasses (i.e. surrounds) the second capacitor electrode (i.e. theinner electrode in this embodiment).

Example 11 provides the device assembly according to any one of Examples8-10, where the capacitor insulator includes a high-k dielectricmaterial, such as e.g. hafnium oxide.

Example 12 provides the device assembly according to any one of Examples8-10, where the capacitor insulator includes a thin-film ferroelectricmaterial, such as e.g. one or more of hafnium zirconium oxide,silicon-doped hafnium oxide, germanium-doped hafnium oxide,aluminum-doped hafnium oxide, and yttrium-doped hafnium oxide.

Example 13 provides the device assembly according to any one of Examples8-12, where a thickness of the capacitor insulator is between about 2and 15 nm, including all values and ranges therein, e.g. between about 3and 10 nm, or between about 5 and 8 nm.

Example 14 provides the device assembly according to any one of Examples8-13, where the first capacitor electrode (i.e. the outer electrode inthis embodiment) is in contact with the capacitor insulator.

Example 15 provides the device assembly according to any one of Examples8-14, where the second capacitor electrode (i.e. the inner electrode inthis embodiment) is in contact with the capacitor insulator.

Example 16 provides the device assembly according to any one of Examples8-15, where a surface area of a transverse cross-section of the secondcapacitor electrode (i.e. the inner electrode in this embodiment) isbetween about 25 and 1600 nm², including all values and ranges therein,e.g. between about 100 and 1600 nm², or between about 400 and 900 nm².

Example 17 provides the device assembly according to any one of Examples8-16, where a thickness of the first capacitor electrode (i.e. the outerelectrode in this embodiment) is between about 5 and 50 nm, includingall values and ranges therein, e.g. between about 10 and 40 nm, orbetween about 20 and 30 nm.

Example 18 provides the device assembly according to any one of thepreceding Examples, where the first capacitor electrode is in contactwith the first dielectric material (i.e. the hardened dielectricmaterial) of the dielectric stack.

Example 19 provides the device assembly according to any one of thepreceding Examples, where the first dielectric material (i.e. thehardened dielectric material) of the dielectric stack is in contact withthe second dielectric material (i.e. the material including aluminum andnitrogen) of the dielectric stack.

Example 20 provides the device assembly according to any one of thepreceding Examples, where the first dielectric material (i.e. thehardened dielectric material) includes one or more of: a compoundincluding silicon and oxygen (e.g. SiO2), a compound including siliconand nitrogen (e.g. SiN), a compound including silicon, oxygen, andnitrogen (e.g. SiON), a compound including aluminum and oxygen (e.g.Al2O3), a compound including hafnium and oxygen (e.g. HfO2), and acompound including aluminum, hafnium, and oxygen (e.g. AlHfO).

Example 21 provides the device assembly according to any one of thepreceding Examples, where a thickness of the layer of the firstdielectric material (i.e. the hardened dielectric material) is betweenabout 5 and 100 nm, e.g. between 10 and 30 nm, or between 15 and 20 nm.

Example 22 provides the device assembly according to any one of thepreceding Examples, where a thickness of the layer of the seconddielectric material (i.e. the material including aluminum and nitrogen)is between 5 and 100 nm, e.g. between 20 and 80 nm, or between 50 and 75nm.

Example 23 provides the device assembly according to any one of thepreceding Examples, where an aspect ratio of the non-planar capacitor(i.e. a ratio of a height of the capacitor and the largest transversedimension of the capacitor) is higher than about 10, e.g. higher than 15or higher than 20.

Example 24 provides a method of fabricating a device assembly with anon-planar capacitor. The method includes providing a three-dimensionalstructure of a sacrificial material over a substrate; at least partiallyenclosing the structure with a shell material; forming a cavity in theshell material by removing at least a portion of the sacrificialmaterial through a first opening in the shell material; and providing afirst capacitor electrode and a second capacitor electrode. The firstcapacitor electrode is within the cavity, and the first capacitorelectrode and the second capacitor electrode are separated by acapacitor insulator.

Example 25 provides the method according to Example 24, where the firstcapacitor electrode is an inner electrode and the second capacitorelectrode is an outer electrode of the non-planar capacitor.

Example 26 provides the method according to Example 25, where providingthe first and second capacitor electrodes includes filling the cavitywith a first capacitor electrode material; and at least partiallyencompassing (i.e. surrounding) the cavity with a second capacitorelectrode material.

Example 27 provides the method according to Example 26, where the shellmaterial forms at least a part of the capacitor insulator.

Example 28 provides the method according to any one of Examples 25-27,where a surface area of a transverse cross-section of the firstcapacitor electrode (i.e. the inner electrode in this embodiment) isbetween about 25 and 2500 nm².

Example 29 provides the method according to any one of Examples 25-28,where a thickness of the second capacitor electrode (i.e. the outerelectrode in this embodiment) is between about 5 and 50 nm.

Example 30 provides the method according to Example 24, where the firstcapacitor electrode is an outer electrode and the second capacitorelectrode is an inner electrode.

Example 31 provides the method according to Example 30, where providingthe first and second capacitor electrodes includes lining an innersurface of the cavity with a first capacitor electrode material; lininga surface of first capacitor electrode material within the cavity with acapacitor insulator material; and depositing a second capacitorelectrode material in an opening at least partially encompassed (i.e.surrounded) by the capacitor insulator material.

Example 32 provides the method according to Examples 30 or 31, where thecapacitor insulator includes a high-k dielectric material.

Example 33 provides the method according to Examples 30 or 31, where thecapacitor insulator includes a thin-film ferroelectric material.

Example 34 provides the method according to any one of Examples 30-33,where a thickness of the capacitor insulator is between about 2 and 15nm.

Example 35 provides the method according to any one of Examples 30-34,where a surface area of a transverse cross-section of the secondcapacitor electrode (i.e. the inner electrode in this embodiment) isbetween about 25 and 1600 nm².

Example 36 provides the method according to any one of Examples 30-35,where a thickness of the first capacitor electrode (i.e. the outerelectrode in this embodiment) is between about 5 and 50 nm.

Example 37 provides the method according to any one of Examples 24-36,where the structure of the sacrificial material is a cylinder or a prismsubstantially perpendicular to the substrate.

Example 38 provides the method according to any one of Examples 24-37,where removing at least a portion of the sacrificial material includesperforming a wet etch to remove the sacrificial material.

Example 39 provides the method according to any one of Examples 24-38,where the shell material includes a material that includes aluminum andnitrogen (e.g. AlN), and where at least partially enclosing thestructure with the shell material includes performing MOCVD orsputtering.

In various further examples, Example provides the method according toany one of Examples 24-39 may be used to form Example provides thedevice assembly according to any one of Examples 1-23.

Example 40 provides a computing device that includes a carrier substrateand an IC die coupled to the carrier substrate. The IC die includes atleast one non-planar capacitor including a first capacitor electrode, asecond capacitor electrode, and a capacitor insulator between the firstand second capacitor electrodes, where at least one of the first andsecond capacitor electrodes is shaped as a cylinder or a prism, and thefirst capacitor electrode is at least partially encompassed by adielectric stack including a layer of a first dielectric material and alayer of a second dielectric material, the second dielectric materialincluding aluminum and nitrogen, e.g. the second dielectric materialincluding (or being) aluminum nitride.

Example 41 provides the computing device according to Example 40, wherethe computing device is a wearable or handheld computing device.

Example 42 provides the computing device according to Examples 40 or 41,where the computing device further includes one or more communicationchips and an antenna.

The above description of illustrated implementations of the disclosure,including what is described in the Abstract, is not intended to beexhaustive or to limit the disclosure to the precise forms disclosed.While specific implementations of, and examples for, the disclosure aredescribed herein for illustrative purposes, various equivalentmodifications are possible within the scope of the disclosure, as thoseskilled in the relevant art will recognize.

These modifications may be made to the disclosure in light of the abovedetailed description. The terms used in the following claims should notbe construed to limit the disclosure to the specific implementationsdisclosed in the specification and the claims. Rather, the scope of thedisclosure is to be determined entirely by the following claims, whichare to be construed in accordance with established doctrines of claiminterpretation.

The invention claimed is:
 1. An integrated circuit (IC) device,comprising: a support structure; and a non-planar capacitor over thesupport structure, the non-planar capacitor comprising a first capacitorelectrode, a second capacitor electrode, and a capacitor insulator,wherein: the capacitor insulator includes a layer of a first dielectricmaterial and a layer of a second dielectric material, the seconddielectric material is different from the first dielectric material andincludes aluminum and nitrogen, the first capacitor electrode has asidewall that extends away from the support structure, the layer of thefirst dielectric material is over the sidewall of the first capacitorelectrode, the layer of the second dielectric material is over thesidewall of the first capacitor electrode so that the layer of the firstdielectric material is between the layer of the second dielectricmaterial and the sidewall of the first capacitor electrode, and thesecond capacitor electrode is over the sidewall of the first capacitorelectrode so that the layer of the first dielectric material and thelayer of the second dielectric material is between the second capacitorelectrode and the sidewall of the first capacitor electrode.
 2. The ICdevice according to claim 1, wherein the first dielectric material isetch-selective with respect to the second dielectric material.
 3. The ICdevice according to claim 1, wherein the first dielectric material is alow dielectric constant material.
 4. The IC device according to claim 1,wherein the first dielectric material includes silicon and oxygen. 5.The IC device according to claim 1, wherein a thickness of the layer ofthe first dielectric material is between about 5 and 100 nanometers. 6.The IC device according to claim 1, wherein a thickness of the layer ofthe first dielectric material is between about 10 and 30 nanometers. 7.The IC device according to claim 1, wherein a thickness of the layer ofthe second dielectric material is between about 5 and 100 nanometers. 8.The IC device according to claim 1, wherein a thickness of the layer ofthe second dielectric material is between about 20 and 80 nanometers. 9.The IC device according to claim 1, wherein an aspect ratio of thenon-planar capacitor is higher than
 10. 10. The IC device according toclaim 1, wherein the first capacitor electrode has a shape of acylinder, and the sidewall is a sidewall of the cylinder.
 11. Anintegrated circuit (IC) device, comprising: a support structure; anon-planar capacitor over the support structure, the non-planarcapacitor comprising a first capacitor electrode, a second capacitorelectrode, and a capacitor insulator; a layer of a first dielectricmaterial; and a layer of a second dielectric material, wherein: thesecond dielectric material is different from the first dielectricmaterial and includes aluminum and nitrogen, the first capacitorelectrode has an inner sidewall and an outer sidewall, the outersidewall being opposite the inner sidewall, the layer of the firstdielectric material is over the outer sidewall, the layer of the seconddielectric material is over the outer sidewall so that the layer of thefirst dielectric material is between the layer of the second dielectricmaterial and the outer sidewall, the capacitor insulator is over theinner sidewall so that the capacitor insulator is between the firstcapacitor electrode and the second capacitor electrode, and the innersidewall is between the capacitor insulator and the outer sidewall. 12.The IC device according to claim 11, wherein the first dielectricmaterial includes silicon and oxygen.
 13. The IC device according toclaim 11, wherein a thickness of the layer of the first dielectricmaterial is between about 10 and 30 nanometers.
 14. The IC deviceaccording to claim 11, wherein a thickness of the layer of the seconddielectric material is between about 20 and 80 nanometers.
 15. The ICdevice according to claim 11, wherein the first capacitor electrode hasa shape of a ring, the inner sidewall is an inner sidewall of the ring,and the outer sidewall is an outer sidewall of the ring.
 16. The ICdevice according to claim 11, wherein each of the inner sidewall and theouter sidewall extends away from the support structure.
 17. The ICdevice according to claim 11, wherein the capacitor insulator includes athin-film ferroelectric material.
 18. A device, comprising: a carriersubstrate; and an integrated circuit (IC) die, coupled to the carriersubstrate, the IC die including: a support structure, and a non-planarcapacitor over the support structure, the non-planar capacitorcomprising a first capacitor electrode, a second capacitor electrode,and a capacitor insulator, wherein: the capacitor insulator includes alayer of a first dielectric material and a layer of a second dielectricmaterial, the second dielectric material is different from the firstdielectric material and includes aluminum and nitrogen, the firstcapacitor electrode has a sidewall that extends away from the supportstructure, the layer of the first dielectric material is over thesidewall of the first capacitor electrode, the layer of the seconddielectric material is over the sidewall of the first capacitorelectrode so that the layer of the first dielectric material is betweenthe layer of the second dielectric material and the sidewall of thefirst capacitor electrode, and the second capacitor electrode is overthe sidewall of the first capacitor electrode so that the layer of thefirst dielectric material and the layer of the second dielectricmaterial is between the second capacitor electrode and the sidewall ofthe first capacitor electrode.
 19. The device according to claim 18,wherein the device is a computing device.
 20. The device according toclaim 18, wherein the device is an IC package.